Conley
micromanipulator



June15, 1965 E. w. CONLEY 3,188,879

MICROMANIPULATOR Filed July 3, 1961 INVEN TOR. fl/GE/Vf 14/ ('wvzar BY Z United States Patent 0 3,188,879 MICROMANIPULATOR Eugene Walter Conley, Somerville, N.J., assignor to Radio Corporation of America, a corporation of Delaware Filed July 3, 1961, Ser. No. 121,561 6 Claims. (Cl. 74-471) This invention relates generally to micromanipulators, and more particularly to improved apparatus for positioning an object so that a predetermined point on the object is in a desired alignment with a point outside of the object. The improved microm-anipulator of the present invention is particularly useful for positioning a semiconductor material with respect to a wire terminal to be connected to it by a thermal compression bonding technique employed in the manufacture of certain semiconductor devices.

Microm-anipulator-s having more than one manually operated control member for moving a specimen into .a desired location have been proposed heretofore. Such prior art m icromanipulators usually require a first manual adjustment of one control member to move the specimen in one direction and a second manual adjustment of another control member to move the specimen transvers'ely to the aforementioned direction. Also, many of the prior art micromanipulators employ a guided specimen table that rides on rails or in grooves, thereby necessitating relatively expensive constructions because of the relatively accurate machining involved.

It is an object of the present invention to provide an improved micromanipulator that obviates, or markedly alleviates, the aforementioned disadvantages of prior art micromanipulators.

Another object of the present invention is to provide an improved micromanipulator wherein a specimen table may be moved in any direction by means of a single control member.

Still another object of the present invention is to provide an improved micromanipulator for positioning an object accurately and for controlling a function to be performed on the object by means of a continuous movement of one hand on a single control member.

A further object of the present invention is to provide an improved micromanipulator of the type described that is relatively simple, inexpensive, and rugged in construction, easy to operate, and highly elficient in use.

Briefly, the improved micromanipulator of the present invention comprises a base plate with a plane surface and a specimen plate slidably mounted on the base plate for movement in any direction along the surface plane. A bar is pivotally coupled to a rod and to a control lever, and.on e end of the rod and one end of the control lever are pivotally coupled respectively to the base plate by ball and socket joints so that the bar may be moved inany direction in response to a movement of the control lever. Pivotal and slidable means couple the specimen plate to the bar so that any movement of the bar along a direction having a component parallel to the plane of the base plate causes a movement of the specimen plate along the surface plane of the base plate in the direction of the component. Means may be associated with the control lever to control a function to be performed upon the object when the latter is positioned at a desired location.

The novel features of the present invention, both as to its organization and method of operation, as well as additional objects and advantages thereof, will be more readily understood from the following description, when read in connection with the accompanying drawing, the single figure of which is a perspective view of one form 3,188,879 Patented June 15, 1965 of improved micromanipulator according to the present invention.

Referring, now, to the drawing, there is shown an improved micrornanipulator 10 for moving a specimen plate 12 on which an object (not shown) may be placed with respect to a stationary base plate 14 by moving a control lever 16. The specimen plate 12 is preferably a fiat plate resting on the flat or plane surface of the fixed base plate 14 and is slida'ble in any direction on the base plate 14.

Means are provided to move the specimen plate 12, with a reduced motion, on the base plate 14 in response to the motion of an operators hand. To this end, the control lever 16 has its lower end fixed to the ball 18 of a ball and socket joint 20. The socket 22 of the ball and socket joint 20 is fixed to the base plate 14 by any suitable means, as by a press fit. With this arrangement, the control lever 16 is pivotally coupled to the base plate 14 for movement in any angular direction with respect to it.

A rod 24 is pivotally coupled to the base plate 14 in a manner similar to that of the control lever 16. The rod 24 has one end fixed to the ball 26 of a ball and socket joint 28. The socket 30 of the ball and socket joint 28 is fixed to the base plate 14, as by a press fit.

A bar 32 is pivotally coupled to the control lever 16 and to the rod 24 so that the control lever and the rod are maintained preferably substantially parallel to each other at all times. Thus, the lever 16 is pivotally coupled adjacent to one end of the bar 32 by means of a pivot pin 34. The ends of the bar 32 are bifurcated, and a portion of the control lever 16 is disposed within a slot 36 formed .by the bifurcated portions of one of the bifurcated ends. The rod 24 is pivotally coupled to the other bifurcated end of the bar 32 by means of a pivot pin 37. The distances between each of the pivot pins 34 and 37 and the base plate 14 are preferably the same. A portion of the rod 24 is disposed in a bifurcated slot 38 formed by the bifurcated portions of the other of the bifurcated ends. The dimensions of the control lever 16 and rod 24 are such that they are slidably disposed in the slots between the portions of the bifurcated ends. With this arrangement, regardless of any motion imparted to the control lever 16, the bar 32 maintains a parallel relationship to the plane of the base plate 14 at all times. The bifurcated ends of the bar 32 function as reinforced guide means for the rod 24 and the control lever 16.

The specimen plate 12 is pivotally and slidab-ly coupled to pins fixed to the bar 32 for movement in response to a movement of the control lever 16. For this purpose, sockets 40 and 42 of ball and socket joints 44 and 46 are fixed to the specimen plate 12 by any suitable means. The balls 48 and 50 of the ball and socket joints 44 and 46 are formed, respectively, with through openings 52 and 54 therein. A pair of pins 56 and 58 is fixed to the bar 32, as by set screws 60 and 62, respectively. The pins 56 and 58 extend, respectively, through the holes 52 and 54 of the balls 48 and 50 are are slidalbly dis-' posed therein for the purpose hereinafter appearing. A tubular member 64 is telescopically and slidably disposed over the free end of the control lever 16. A knob 65 is fitted to the free end of the tubular member 64 for manipulating the control lever 16. The free end of the control lever 16 may be of reduced diameter, as shown.

The movement of the specimen plate 12 in any direction along the base plate 14 will now be explained. Let it be assumed that an object (not shown) on the specimen plate 12 is to be moved to a predetermined position so that a certain operation may be performed upon it. The operator can move the specimen plate 12 to any desired location along the base plate 14 by grasping the knob 65 sassy/o plate 12 is slid along the base plate 14 by the component of motion in the plane of the base plate 14. Because the lever 16 is connected as a third order lever, the distance moved by the pin 34 may be relatively much smaller than the distance moved by the knob 65, resulting from the motion of the operators hand. With this reduced motion, relatively fine adjustments of the specimen plate 12 can be accomplished by relatively coarser movements of the handon the knob 65.

An object on the specimen plate 12 is usually positioned at a predetermined location so that an operation may be performed upon it. In accordance with the presentinvention, means are provided to control this operation Without the operator having to remove his hand from the knob 65. To this end, a rod 66 is pivotally coupled to the tubular member 64, as by a ball and socket joint 68. The ball 76 of the ball and socket joint 68 is fixed to the tubular member 64 and the socket '72 of the ball and socket joint 68 is fixed to the rod 66 for movement therewith, as shown. Qne end of the rod 66 is slidably disposed in a through opening 74 of the ball 76 of a ball and socket joint '78. The socket '79 of the ball and socket joint 7 8 is anchored, preferably by adjustable means, to a bracket 80 which may be fixed to the base plate 1 by any suitable means. The rod 66 is also slidably disposed in a through opening 82 in the ball 8 of a ball and socket joint 86. The socket 88 of the ball and socket joint 86 is fixed to an arm 90 for movement in a direction having a component in a vertical plane. It will be understood that the arm 96 may be linked to any machine or switch that is adapted to be actuated by a component of motion in the vertical direction. The arm 90 extends through a slot 93 in the bracket 80 to permit motion of the arm 90 in a plane which is perpendicular to the plane of the base plate 14 and which is also perpendicular to the bar 32, as necessitated by motion of the lever 16.

In operation, after an object on the specimen plate 12 is positioned in the manner described heretofore, the operator need only move the knob 65 so that the member 64 moves toward the pivoted end of the control lever to. This motion causes the arm 90 to move in a direction having acomponent along a vertical axis. The arm 90 may be moved upwardly by means of a spring 9?: disposed around the arm 90 between its enlarged, upper end and the bracket 80. Thus, means may be connected to the arm 90 to control an operation on a specimen supported on the specimen plate 12 after the specimen has been positioned at a desired location. For example, the specimen or object positioned by the specimen plate 12 may be a semiconductor device to which a wire terminal is to be bonded. The wire terminal and'bonding means may be coupled to the arm 90, and the bonding operation doubt, readily suggestthemselves to those skilled in the art. Hence, itis desired that the foregoing description shall be considered merely as illustrative and not in a limiting sense.

What is claimed is:

It. A micromanipulator comprising a base plate having a flat, upper surface, a specimen plate mounted directly on said base plate upper surface for movement alongsaid base plate, first, second, third, and fourth ball and socket joints, a rod, said first ball and socket joint supporting a spaced relationship to said rod, and a pair of pinsfixed to said bar in a spaced-apart, parallel relationship and extending from said bar, said third and said fourth ball and socket joints respectively pivotally connecting a dif ferent pin of said pair of pins to said specimen plate whereby a movement of said pins along a direction having a component parallel to the plane of said base plate upper surface causes a movement of said specimen plate along'said base plate.

2. A micromanipulator comprising a stationary base plate, a specimen plate slidably mounted on said base plate for movement in any direction along said base plate, first, second, third, and fourth ball and socket joints, a rod, said first ball and socket joint supporting one end of said rod on said base plate for pivotal movement with respect thereto, a control lever, said second ball and socket joint supporting one end of said lever on said base plate for pivotal movement with respect thereto, a bar, means pivotally connecting said rod to said bar adjacent to one end of said bar, means pivotally connecting said lever to said bar adjacent to the other end pair of pins to said specimen plate, each of the balls of said third and said fourth ball and socket joints being depressing the knob toward the pivoted end of the v control lever 16. The arm 90 may also be connected to an electrical switch that is adapted to be actuated by a vertical component of motion. Hence, by depressing the knob 65, the switch may be actuated to initiate a desired operation after an objector specimen has been properly positioned by the specimen plate 12.

From the foregoing description, it will be apparent that there has been provided an improved micromanipulator for positioning an object accurately and for controlling an operation on the object after it has been positioncd. While only one embodiment of the invention has been shown and described, variations in the micromanipulator coming within the spirit of this invention will, no

formed with an opening for receiving said pins slidably therein whereby a movement of said pins with respect to a direction having a component parallel to the plane of said base plate causes a movement of said specimen plate along said base plate in the direction of 'said com- 7,

ponent.

3. A micromanipulator comprising a stationary base plate, a specimen plate slidably mounted on said base plate first ball and socket joint supporting one end of said rod on said base plate for pivotal movement with respect thereto, a control lever, said second ball and socket joint supporting one end of said lever on said base plate for pivotal movement with respect thereto, a bar having two bifurcated ends defining two parallel slots, respectively, means ivotally connecting said rod to said bar adjacent to one end of said bar at a predetermined distance from said base plate, a portion of said rod being disposed in one of said slots, means pivotally connecting said lever to said bar adjacent to the other end of said bar at said predetermined distance from said base plate, a portion of said lever being disposed in the other of said slots, and a pair of pins fixed to said bar in a spaced-apart, parallel relationship and extending from said bar, said third and said fourth ball and socket joints respectively pivotally connecting a ditferent plate, a specimen plate disposed on said base plate for slidable movement thereon, first, second, third, and fourth ball and socket joints, the sockets of said first and second ball and socket joints being fixed to said base plate in a spaced-apart relationship, a rod having one end fixed to the ball of said first ball and socket joint, a control lever having one end fixed to the ball of said second ball and socket joint, a bar having one end pivotally connected to said rod and the other end pivotally connected to said control lever, means fixing the sockets of said third and fourth ball and socket joints to said specimen plate in a spaced-apart relationship, a through opening in each of the balls of said third and fourth ball and socket joints, and two pins fixed to said bar between the ends thereof in a spaced-apart, parallel relationship and extending from said bar, said pins being adapted to extend into said openings and to he slidable therein, respectively, whereby said specimen plate may be moved with respect to said base plate in response to movements of said lever.

5. A positioning device comprising a stationary base plate, a specimen plate disposed on said base plate for slidable movement in any direction thereon, first, second, third and fourth ball and socket joints, said sockets of said first and second ball and socket joints being fixed to said base plate in a spaced-apart relationship, a rod having one end fixed to the ball of said first ball and socket joint, a control lever having one end fixed to the ball of said second ball and socket joint, a bar having one bifurcated end pivotally connected to said rod at a predetermined distance from said base plate and its other bifurcated end pivotally connected to said control lever at said predetermined distance from said base plate, portions of said rod and said lever being disposed in and guided by the slots defined by said bifurcated ends, respectively, means fixing the sockets of said third and fourth ball and socket joints to said specimen plate in a spaced-apart relationship, a through open ing in each of the balls of said third and fourth ball and socket joints, and two pins fixed to said bar between the ends thereof in a spaced-apart and parallel relationship and extending from said bar, said pins being adapted to extend into said openings and to be slida ble therein, respectively, whereby said specimen plate is moved along said base plate in response to movements of the other end of said lever.

6. In combination, apparatus comprising a base plate, a 4

a specimen plate on said base plate and slidable thereon, first, second, third, fourth, fifth and sixth ball and socket joints, a first rod, said first ball and socket joint supporting one end of said first rod on said base plate for pivotal movement, a control lever, said second ball and socket joint supporting one end of said lever on said base plate for pivotal movement, a bar, means pivotally connecting said first rod to said bar adjacent to one end of said bar, means pivotally connecting said lever to said bar adjacent to the other end of said bar, a pair of pins fixed to said bar and extending therefrom, said third and fourth ball and socket joints respectively connecting said pins to said specimen plate whereby a movement of said lever will cause a movement of said specimen plate, a member telescopically slidable on said lever, a second rod, means fixing the socket of said fifth ball and socket joint with respect to said base plate, the balls of said fifth and said sixth ball and socket joints being formed with through openings, means pivotally connecting one end of said second rod to said member with portions adjacent to the other end of said second rod slidably disposed in the through openings of said balls of said fifth and said sixth ball and socket joints, and means connected to the socket of said sixth ball and socket joint for movement in re- 1sponse to movement of said member with respect to said ever.

References Cited by the Examiner UNITED STATES PATENTS 1,285,076 11/18 Dunn 74473 1,331,685 2/20 Umsted 74-473 1,452,296 4/ 23 Howard.

1,488,077 3/24 Turner 74473 2,240,398 4/41 Huitt.

2,644,363 7/53 Capitani 74-491 X 2,684,855 7/54 Wales et a1. 269 2,700,904 2/55 Woods 74-471 2,786,389 3/57 Bennett et al 8840 2,800,055 7/57 May 88-40 2,940,357 6/60 Oswold 88-40 2,988,928 6/61 De Fonbrune et al 74-471 3,006,245 10/ 61 Bycer et al. 8840 3,010,363 11/61 Malfeld 8839 X 3,050,617 8/62 Lasch et al 219 FOREIGN PATENTS 848 1893 Great Britain. 531,423 1/41 Great Britain. 123,224 11/48 Sweden.

BROUGHTON G. DURHAM, Primary Examiner. 

1. A MICROMANIPULATOR COMPRISING A BASE PLATE HAVING A FLAT, UPPER SURFACE, A SPECIMEN PLATE MOUNTED DIRECTLY ON SAID BASE PLATE UPPER SURFACE FOR MOVEMENT ALONG SAID BASE PLATE, FIRST, SECOND, THIRD, AND FOURTH BALL AND SOCKET JOINTS, A ROD, SAID FIRST BASS AND SOCKET JOINT SUPPORTING ONE END OF SAID ROD ON SAID BASE PLATE FOR PIVOTAL MOVEMENT WITH RESPECT THERETO, A CONTROL LEVER, SAID SECOND BALL AND SOCKET JOINT SUPPORTING ONE END OF SAID LEVER ON SAID BASE PLATE FOR PIVOTAL MOVEMENT WITH RESPECT THERETO, A BAR, MEANS PIVOTALLY CONNECTING SAID ROD TO SAID BAR, MEANS PIVOTALLY CONNECTING SAID LEVER TO SAID BAR TO A SPACED RELATIONSHIP TO SAID ROD, AND A PAIR OF PINS FIXED TO SAID BAR IN A SPACED-APART, PARALLEL RELATIONSHIP AND EXTENDING FROM SAID BAR, SAID THIRD AND SAID FOURTH BALL AND SOCKET JOINTS RESPECTIVELY PIVOTALLY CONNECTING A DIFFERENT PIN OF SAID PAIR OF PINS TO SAID SPECIMEN PLATE WHEREBY A MOVEMENT OF SAID PINS ALONG A DIRECTION HAVING A COMPONENT PARALLEL TO THE PLANE OF SAID BASE PLATE UPPER SURFACE CAUSES A MOVEMENT OF SAID SPECIMEN PLATE ALONG SAID BASE PLATE. 